Wavelength-Demultiplexed Laser Interferometry for Metrology
Non-contact, cost-efficient, and long-range precision metrology is essential for applications in diverse areas, from 3D sensing and robotics to automated manufacturing, and multiwavelength interferometry is a compelling candidate. Here, we present a new arithmetic approach for multiwavelength phase...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
|
| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9294043/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849707796230045696 |
|---|---|
| author | Zain Zaidi Vala Fathipour Xiangli Jia Connie Chang-Hasnain |
| author_facet | Zain Zaidi Vala Fathipour Xiangli Jia Connie Chang-Hasnain |
| author_sort | Zain Zaidi |
| collection | DOAJ |
| description | Non-contact, cost-efficient, and long-range precision metrology is essential for applications in diverse areas, from 3D sensing and robotics to automated manufacturing, and multiwavelength interferometry is a compelling candidate. Here, we present a new arithmetic approach for multiwavelength phase unwrapping, with the maximum theoretical range and tolerance to measurement noise in phase. We supplement our formulation with a simultaneous phase shifting interferometry setup with a low measured standard deviation of phase, <inline-formula><tex-math notation="LaTeX">$\sigma _\phi ={2\pi }/{1325}$</tex-math></inline-formula>. We unwrap the interferometric phases of experiments performed through wavelengths with a greatest common divisor of 25 nm, demonstrate a range equal to their lowest-common-multiple with the precision of a single wavelength interferometer, and reconstruct three-dimensional scenes based on a single-pixel 3D imaging system. |
| format | Article |
| id | doaj-art-5e7340f8ab7143239a812ed14bf9c58f |
| institution | DOAJ |
| issn | 1943-0655 |
| language | English |
| publishDate | 2021-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-5e7340f8ab7143239a812ed14bf9c58f2025-08-20T03:15:50ZengIEEEIEEE Photonics Journal1943-06552021-01-011311910.1109/JPHOT.2020.30449699294043Wavelength-Demultiplexed Laser Interferometry for MetrologyZain Zaidi0Vala Fathipour1Xiangli Jia2https://orcid.org/0000-0002-4754-8001Connie Chang-Hasnain3https://orcid.org/0000-0002-5341-6267Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA, USADepartment of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA, USAApplied Science and Technology, University of California, Berkeley, CA, USADepartment of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA, USANon-contact, cost-efficient, and long-range precision metrology is essential for applications in diverse areas, from 3D sensing and robotics to automated manufacturing, and multiwavelength interferometry is a compelling candidate. Here, we present a new arithmetic approach for multiwavelength phase unwrapping, with the maximum theoretical range and tolerance to measurement noise in phase. We supplement our formulation with a simultaneous phase shifting interferometry setup with a low measured standard deviation of phase, <inline-formula><tex-math notation="LaTeX">$\sigma _\phi ={2\pi }/{1325}$</tex-math></inline-formula>. We unwrap the interferometric phases of experiments performed through wavelengths with a greatest common divisor of 25 nm, demonstrate a range equal to their lowest-common-multiple with the precision of a single wavelength interferometer, and reconstruct three-dimensional scenes based on a single-pixel 3D imaging system.https://ieeexplore.ieee.org/document/9294043/Imaginginterferometrymetrologypolarization |
| spellingShingle | Zain Zaidi Vala Fathipour Xiangli Jia Connie Chang-Hasnain Wavelength-Demultiplexed Laser Interferometry for Metrology IEEE Photonics Journal Imaging interferometry metrology polarization |
| title | Wavelength-Demultiplexed Laser Interferometry for Metrology |
| title_full | Wavelength-Demultiplexed Laser Interferometry for Metrology |
| title_fullStr | Wavelength-Demultiplexed Laser Interferometry for Metrology |
| title_full_unstemmed | Wavelength-Demultiplexed Laser Interferometry for Metrology |
| title_short | Wavelength-Demultiplexed Laser Interferometry for Metrology |
| title_sort | wavelength demultiplexed laser interferometry for metrology |
| topic | Imaging interferometry metrology polarization |
| url | https://ieeexplore.ieee.org/document/9294043/ |
| work_keys_str_mv | AT zainzaidi wavelengthdemultiplexedlaserinterferometryformetrology AT valafathipour wavelengthdemultiplexedlaserinterferometryformetrology AT xianglijia wavelengthdemultiplexedlaserinterferometryformetrology AT conniechanghasnain wavelengthdemultiplexedlaserinterferometryformetrology |