Wavelength-Demultiplexed Laser Interferometry for Metrology

Non-contact, cost-efficient, and long-range precision metrology is essential for applications in diverse areas, from 3D sensing and robotics to automated manufacturing, and multiwavelength interferometry is a compelling candidate. Here, we present a new arithmetic approach for multiwavelength phase...

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Bibliographic Details
Main Authors: Zain Zaidi, Vala Fathipour, Xiangli Jia, Connie Chang-Hasnain
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/9294043/
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Summary:Non-contact, cost-efficient, and long-range precision metrology is essential for applications in diverse areas, from 3D sensing and robotics to automated manufacturing, and multiwavelength interferometry is a compelling candidate. Here, we present a new arithmetic approach for multiwavelength phase unwrapping, with the maximum theoretical range and tolerance to measurement noise in phase. We supplement our formulation with a simultaneous phase shifting interferometry setup with a low measured standard deviation of phase, <inline-formula><tex-math notation="LaTeX">$\sigma _\phi ={2\pi }/{1325}$</tex-math></inline-formula>. We unwrap the interferometric phases of experiments performed through wavelengths with a greatest common divisor of 25 nm, demonstrate a range equal to their lowest-common-multiple with the precision of a single wavelength interferometer, and reconstruct three-dimensional scenes based on a single-pixel 3D imaging system.
ISSN:1943-0655