Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy
Electro-optic LiNbO3 thin films were deposited on Si(100) and Si(111) substrates using a radio-frequency magnetron sputtering process. The piezoelectric properties of the LiNbO3 films were investigated using the scanning probe microscopy in the piezoresponse mode. The obtained results show the high...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2013-12-01
|
| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2013/4/articles/jnep_2013_V5_04041.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849700890000228352 |
|---|---|
| author | D.A. Kiselev S.V. Ksenich R.N. Zhukov A.S. Bykov M.D. Malinkovich V.V. Shvartsman D.C. Lupascu Yu.N. Parkhomenko |
| author_facet | D.A. Kiselev S.V. Ksenich R.N. Zhukov A.S. Bykov M.D. Malinkovich V.V. Shvartsman D.C. Lupascu Yu.N. Parkhomenko |
| author_sort | D.A. Kiselev |
| collection | DOAJ |
| description | Electro-optic LiNbO3 thin films were deposited on Si(100) and Si(111) substrates using a radio-frequency magnetron sputtering process. The piezoelectric properties of the LiNbO3 films were investigated using the scanning probe microscopy in the piezoresponse mode. The obtained results show the high degree of grains orientation in polycrystalline structure. The piezoelectric modulus (dzz) was estimated to be 16 pm/V (for LiNbO3 / Si(100)) and 22 pm/V (for LiNbO3 / Si(111)) and the polarization about of 0.37 C·m – 2. These values are larger than those reported previously for LiNbO3 films. |
| format | Article |
| id | doaj-art-5e4974052c1948dbb44be8e49664aef2 |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2013-12-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-5e4974052c1948dbb44be8e49664aef22025-08-20T03:18:08ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722013-12-015404041-104041-3Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force MicroscopyD.A. Kiselev0S.V. Ksenich1R.N. Zhukov2A.S. Bykov3M.D. Malinkovich4 V.V. Shvartsman5D.C. Lupascu6Yu.N. Parkhomenko7National University of Science and Technology "MISiS", 4, Leninskiy Pr., 119049 Moscow, Russian FederationNational University of Science and Technology "MISiS", 4, Leninskiy Pr., 119049 Moscow, Russian FederationNational University of Science and Technology "MISiS", 4, Leninskiy Pr., 119049 Moscow, Russian FederationNational University of Science and Technology "MISiS", 4, Leninskiy Pr., 119049 Moscow, Russian FederationNational University of Science and Technology "MISiS", 4, Leninskiy Pr., 119049 Moscow, Russian FederationInstitut für Materialwissenschaft, and Center for Nanointegration Duisburg-Essen (CENIDE), Universität Duisburg-Essen, 15, Universitätsstr., 45141 Essen, GermanyInstitut für Materialwissenschaft, and Center for Nanointegration Duisburg-Essen (CENIDE), Universität Duisburg-Essen, 15, Universitätsstr., 45141 Essen, GermanyNational University of Science and Technology "MISiS", 4, Leninskiy Pr., 119049 Moscow, Russian FederationElectro-optic LiNbO3 thin films were deposited on Si(100) and Si(111) substrates using a radio-frequency magnetron sputtering process. The piezoelectric properties of the LiNbO3 films were investigated using the scanning probe microscopy in the piezoresponse mode. The obtained results show the high degree of grains orientation in polycrystalline structure. The piezoelectric modulus (dzz) was estimated to be 16 pm/V (for LiNbO3 / Si(100)) and 22 pm/V (for LiNbO3 / Si(111)) and the polarization about of 0.37 C·m – 2. These values are larger than those reported previously for LiNbO3 films.http://jnep.sumdu.edu.ua/download/numbers/2013/4/articles/jnep_2013_V5_04041.pdfLiNbO3 thin filmPiezoresponse force microscopyDomain structure |
| spellingShingle | D.A. Kiselev S.V. Ksenich R.N. Zhukov A.S. Bykov M.D. Malinkovich V.V. Shvartsman D.C. Lupascu Yu.N. Parkhomenko Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy Журнал нано- та електронної фізики LiNbO3 thin film Piezoresponse force microscopy Domain structure |
| title | Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy |
| title_full | Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy |
| title_fullStr | Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy |
| title_full_unstemmed | Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy |
| title_short | Piezoelectric Characteristics of LiNbO3 Thin-film Heterostructures via Piezoresponse Force Microscopy |
| title_sort | piezoelectric characteristics of linbo3 thin film heterostructures via piezoresponse force microscopy |
| topic | LiNbO3 thin film Piezoresponse force microscopy Domain structure |
| url | http://jnep.sumdu.edu.ua/download/numbers/2013/4/articles/jnep_2013_V5_04041.pdf |
| work_keys_str_mv | AT dakiselev piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT svksenich piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT rnzhukov piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT asbykov piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT mdmalinkovich piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT vvshvartsman piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT dclupascu piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy AT yunparkhomenko piezoelectriccharacteristicsoflinbo3thinfilmheterostructuresviapiezoresponseforcemicroscopy |