Substrate Effect on the Optical Reflectance and Transmittance of Thin-Film Structures
A rigorous and consistent approach is demonstrated to develop a model of the 4M structure (the four-media structure of a film on a substrate of finite thickness). The general equations obtained for the reflectance and transmittance spectra of the 4M structure are simplified by employing a procedure...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2010-01-01
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| Series: | International Journal of Optics |
| Online Access: | http://dx.doi.org/10.1155/2010/137572 |
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| Summary: | A rigorous and consistent approach is demonstrated to develop a model of the 4M structure (the four-media structure of a film on a substrate of finite thickness). The general equations obtained for the reflectance and transmittance spectra of the 4M structure are simplified by employing a procedure of the so-called device averaging to reduce them to a succinct form convenient for processing of experimental spectra for the structures with a thick substrate. The newly derived equations are applied to two special cases: (i) an arbitrary film on highly absorbing substrates and (ii) a slightly absorbing film on transparent substrates. The reflectance and transmittance spectra represented in the simplified (with the device averaging) form have a practical application for determining the film thickness and optical constants from experimental spectra by using the known techniques. |
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| ISSN: | 1687-9384 1687-9392 |