A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources
In this research, the electrical characteristics of glow discharge plasma were studied. Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized. The distance between two electrodes is...
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| Format: | Article |
| Language: | English |
| Published: |
University of Baghdad, College of Science for Women
2018-12-01
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| Series: | مجلة بغداد للعلوم |
| Subjects: | |
| Online Access: | http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/37 |
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