A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources
In this research, the electrical characteristics of glow discharge plasma were studied. Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized. The distance between two electrodes is...
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University of Baghdad, College of Science for Women
2018-12-01
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| Series: | مجلة بغداد للعلوم |
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| Online Access: | http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/37 |
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| description | In this research, the electrical characteristics of glow discharge plasma were studied. Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized. The distance between two electrodes is 4cm. The gas used to produce plasma is argon gas which flows inside the chamber at a rate of 40 sccm. The influence of work function for different target materials (gold, copper, and silver), - 5cm in diameter and around 1mm thickness - different working pressures, and different applied voltages on electrical characteristics (discharge current, discharge potential, and Paschen’s curve) were studied. The results showed that the discharge current and potential increase by increasing the applied voltage ranging between 300-700 V. Discharge current increased as working pressure increased in the beginning, and then semi-stabilized (slight increase) starting from 1×100 mbar, while discharge potential decreased at the beginning as working pressure increased and then semi-stabilized at the same point at which discharge current stabilized. The Paschen’s curves were compared with each other. It was concluded that the lower breakdown voltage was associated with lower work function of the (Au, Cu, and Ag) cathode material. Breakdown voltages were (395, 398, and 420) for Ag, Cu and Au respectively. |
| format | Article |
| id | doaj-art-5c0c2d5561cc4b2ab65a48030c5ff265 |
| institution | Kabale University |
| issn | 2078-8665 2411-7986 |
| language | English |
| publishDate | 2018-12-01 |
| publisher | University of Baghdad, College of Science for Women |
| record_format | Article |
| series | مجلة بغداد للعلوم |
| spelling | doaj-art-5c0c2d5561cc4b2ab65a48030c5ff2652025-08-20T03:34:29ZengUniversity of Baghdad, College of Science for Womenمجلة بغداد للعلوم2078-86652411-79862018-12-0115410.21123/bsj.15.4.436-440A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target SourcesBaghdad Science JournalIn this research, the electrical characteristics of glow discharge plasma were studied. Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized. The distance between two electrodes is 4cm. The gas used to produce plasma is argon gas which flows inside the chamber at a rate of 40 sccm. The influence of work function for different target materials (gold, copper, and silver), - 5cm in diameter and around 1mm thickness - different working pressures, and different applied voltages on electrical characteristics (discharge current, discharge potential, and Paschen’s curve) were studied. The results showed that the discharge current and potential increase by increasing the applied voltage ranging between 300-700 V. Discharge current increased as working pressure increased in the beginning, and then semi-stabilized (slight increase) starting from 1×100 mbar, while discharge potential decreased at the beginning as working pressure increased and then semi-stabilized at the same point at which discharge current stabilized. The Paschen’s curves were compared with each other. It was concluded that the lower breakdown voltage was associated with lower work function of the (Au, Cu, and Ag) cathode material. Breakdown voltages were (395, 398, and 420) for Ag, Cu and Au respectively.http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/37DC sputtering, Glow discharge, Paschen's law, Plasma discharges. |
| spellingShingle | Baghdad Science Journal A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources مجلة بغداد للعلوم DC sputtering, Glow discharge, Paschen's law, Plasma discharges. |
| title | A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources |
| title_full | A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources |
| title_fullStr | A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources |
| title_full_unstemmed | A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources |
| title_short | A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources |
| title_sort | comparative study on the electrical characteristics of generating plasma by using different target sources |
| topic | DC sputtering, Glow discharge, Paschen's law, Plasma discharges. |
| url | http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/37 |
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