Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique
A waveguide 10 dB directional coupler operating from 325 GHz to 400 GHz is designed based on the short-slot Riblet-type coupling configuration and fabricated using the deep reactive ion etching (DRIE) silicon micromachining technique. The skin depth and the conductivity of the gold film with the rou...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2015-01-01
|
| Series: | International Journal of Antennas and Propagation |
| Online Access: | http://dx.doi.org/10.1155/2015/940212 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849412421536448512 |
|---|---|
| author | Shuang Liu Jiang Hu Yong Zhang Yupeng Liu Tianhao Ren Ruimin Xu Quan Xue |
| author_facet | Shuang Liu Jiang Hu Yong Zhang Yupeng Liu Tianhao Ren Ruimin Xu Quan Xue |
| author_sort | Shuang Liu |
| collection | DOAJ |
| description | A waveguide 10 dB directional coupler operating from 325 GHz to 400 GHz is designed based on the short-slot Riblet-type coupling configuration and fabricated using the deep reactive ion etching (DRIE) silicon micromachining technique. The skin depth and the conductivity of the gold film with the roughness of 0.2 μm are investigated at 300~1000 GHz frequency band for the higher accuracy. In order to measure the small-size four-port coupler using the two-port VNA with big-size flanges, three testing topologies are designed, in which the terahertz (THz) wedged-type absorbing material terminals are adopted as the waveguide matching loads. The measured average insertion loss is 0.5 dB after deducting the intrinsic loss and the measured average isolation is better than 25 dB, which are in good agreement with simulations. The analysis and the design are verified to be accurate and valuable for the high-performance sub-millimeter-wave waveguide components. |
| format | Article |
| id | doaj-art-5ba5fc13a6eb4b1da8b7a7bd554c0dc2 |
| institution | Kabale University |
| issn | 1687-5869 1687-5877 |
| language | English |
| publishDate | 2015-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Antennas and Propagation |
| spelling | doaj-art-5ba5fc13a6eb4b1da8b7a7bd554c0dc22025-08-20T03:34:26ZengWileyInternational Journal of Antennas and Propagation1687-58691687-58772015-01-01201510.1155/2015/940212940212Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining TechniqueShuang Liu0Jiang Hu1Yong Zhang2Yupeng Liu3Tianhao Ren4Ruimin Xu5Quan Xue6School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaDepartment of Electronic Engineering, City University of Hong Kong, Kowloon, Hong KongA waveguide 10 dB directional coupler operating from 325 GHz to 400 GHz is designed based on the short-slot Riblet-type coupling configuration and fabricated using the deep reactive ion etching (DRIE) silicon micromachining technique. The skin depth and the conductivity of the gold film with the roughness of 0.2 μm are investigated at 300~1000 GHz frequency band for the higher accuracy. In order to measure the small-size four-port coupler using the two-port VNA with big-size flanges, three testing topologies are designed, in which the terahertz (THz) wedged-type absorbing material terminals are adopted as the waveguide matching loads. The measured average insertion loss is 0.5 dB after deducting the intrinsic loss and the measured average isolation is better than 25 dB, which are in good agreement with simulations. The analysis and the design are verified to be accurate and valuable for the high-performance sub-millimeter-wave waveguide components.http://dx.doi.org/10.1155/2015/940212 |
| spellingShingle | Shuang Liu Jiang Hu Yong Zhang Yupeng Liu Tianhao Ren Ruimin Xu Quan Xue Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique International Journal of Antennas and Propagation |
| title | Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique |
| title_full | Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique |
| title_fullStr | Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique |
| title_full_unstemmed | Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique |
| title_short | Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique |
| title_sort | sub millimeter wave 10 db directional coupler based on micromachining technique |
| url | http://dx.doi.org/10.1155/2015/940212 |
| work_keys_str_mv | AT shuangliu submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique AT jianghu submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique AT yongzhang submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique AT yupengliu submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique AT tianhaoren submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique AT ruiminxu submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique AT quanxue submillimeterwave10dbdirectionalcouplerbasedonmicromachiningtechnique |