Li, C., Li, M., Shi, J., Huang, H., & Li, Z. Evaluation and Characterization of High-Uniformity SiN<sub>x</sub> Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments. MDPI AG.
Chicago Style (17th ed.) CitationLi, Caifang, Minghui Li, Jinsong Shi, Haibin Huang, and Zhimei Li. Evaluation and Characterization of High-Uniformity SiN<sub>x</sub> Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments. MDPI AG.
MLA (9th ed.) CitationLi, Caifang, et al. Evaluation and Characterization of High-Uniformity SiN<sub>x</sub> Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments. MDPI AG.
Warning: These citations may not always be 100% accurate.