Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement
This paper presents a compact extrinsic Fabry-Perot acoustic sensor. The key component of this sensor is a SOI chip with acoustic sensing Si diaphragm of 5 mm diameter and <inline-formula><tex-math notation="LaTeX">$2\,{\rm{\mu m}}$</tex-math></inline-formula> thick...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11002598/ |
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