Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement
This paper presents a compact extrinsic Fabry-Perot acoustic sensor. The key component of this sensor is a SOI chip with acoustic sensing Si diaphragm of 5 mm diameter and <inline-formula><tex-math notation="LaTeX">$2\,{\rm{\mu m}}$</tex-math></inline-formula> thick...
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| Format: | Article |
| Language: | English |
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IEEE
2025-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/11002598/ |
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| author | Qi Xi Binghe Ma Zhiyong Tian Ruofei Li Yinan Wang Zhibo Ma |
| author_facet | Qi Xi Binghe Ma Zhiyong Tian Ruofei Li Yinan Wang Zhibo Ma |
| author_sort | Qi Xi |
| collection | DOAJ |
| description | This paper presents a compact extrinsic Fabry-Perot acoustic sensor. The key component of this sensor is a SOI chip with acoustic sensing Si diaphragm of 5 mm diameter and <inline-formula><tex-math notation="LaTeX">$2\,{\rm{\mu m}}$</tex-math></inline-formula> thickness, which is obtained by micro fabrication process. Acoustic calibration experiment indicates that the sensor exhibits a frequency response range over 100 Hz-20 kHz, and a sensitivity of <inline-formula><tex-math notation="LaTeX">${95}\,{\rm{.73mV/Pa}}$</tex-math></inline-formula>. High temperature plane wave tube is established for experiment that simulates the acoustic field in harsh environment, indicating that the sensor is able to realize acoustic sensing with ambient temperature up to <inline-formula><tex-math notation="LaTeX">${589}\,^\circ \mathrm{C}$</tex-math></inline-formula>. The prospect of our proposed sensor is realizing multi-point, in-situ acoustic measurement in harsh environment of aerospace engine internal flow field, enabled by its batch fabrication process and high compactness as well as sensitivity, which we believe will shows great potential in significant industrial domains. |
| format | Article |
| id | doaj-art-5afaa3a7c39e4661a4a0a0036fe6cd1f |
| institution | OA Journals |
| issn | 1943-0655 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-5afaa3a7c39e4661a4a0a0036fe6cd1f2025-08-20T02:08:46ZengIEEEIEEE Photonics Journal1943-06552025-01-011731710.1109/JPHOT.2025.356954011002598Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic MeasurementQi Xi0https://orcid.org/0000-0001-6499-7805Binghe Ma1Zhiyong Tian2https://orcid.org/0009-0001-7118-5802Ruofei Li3https://orcid.org/0009-0000-1393-5022Yinan Wang4Zhibo Ma5https://orcid.org/0000-0001-5017-0452Ministry of Education Key Lab of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi'an, ChinaMinistry of Education Key Lab of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi'an, ChinaMinistry of Education Key Lab of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi'an, ChinaMinistry of Education Key Lab of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi'an, ChinaMinistry of Education Key Lab of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi'an, ChinaMinistry of Education Key Lab of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi'an, ChinaThis paper presents a compact extrinsic Fabry-Perot acoustic sensor. The key component of this sensor is a SOI chip with acoustic sensing Si diaphragm of 5 mm diameter and <inline-formula><tex-math notation="LaTeX">$2\,{\rm{\mu m}}$</tex-math></inline-formula> thickness, which is obtained by micro fabrication process. Acoustic calibration experiment indicates that the sensor exhibits a frequency response range over 100 Hz-20 kHz, and a sensitivity of <inline-formula><tex-math notation="LaTeX">${95}\,{\rm{.73mV/Pa}}$</tex-math></inline-formula>. High temperature plane wave tube is established for experiment that simulates the acoustic field in harsh environment, indicating that the sensor is able to realize acoustic sensing with ambient temperature up to <inline-formula><tex-math notation="LaTeX">${589}\,^\circ \mathrm{C}$</tex-math></inline-formula>. The prospect of our proposed sensor is realizing multi-point, in-situ acoustic measurement in harsh environment of aerospace engine internal flow field, enabled by its batch fabrication process and high compactness as well as sensitivity, which we believe will shows great potential in significant industrial domains.https://ieeexplore.ieee.org/document/11002598/Extrinsic Fabry-Perot interferometeracoustic sensorsSOIharsh environments |
| spellingShingle | Qi Xi Binghe Ma Zhiyong Tian Ruofei Li Yinan Wang Zhibo Ma Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement IEEE Photonics Journal Extrinsic Fabry-Perot interferometer acoustic sensors SOI harsh environments |
| title | Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement |
| title_full | Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement |
| title_fullStr | Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement |
| title_full_unstemmed | Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement |
| title_short | Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement |
| title_sort | micro fabricated compact extrinsic fabry perot sensor for in situ harsh environment acoustic measurement |
| topic | Extrinsic Fabry-Perot interferometer acoustic sensors SOI harsh environments |
| url | https://ieeexplore.ieee.org/document/11002598/ |
| work_keys_str_mv | AT qixi microfabricatedcompactextrinsicfabryperotsensorforinsituharshenvironmentacousticmeasurement AT binghema microfabricatedcompactextrinsicfabryperotsensorforinsituharshenvironmentacousticmeasurement AT zhiyongtian microfabricatedcompactextrinsicfabryperotsensorforinsituharshenvironmentacousticmeasurement AT ruofeili microfabricatedcompactextrinsicfabryperotsensorforinsituharshenvironmentacousticmeasurement AT yinanwang microfabricatedcompactextrinsicfabryperotsensorforinsituharshenvironmentacousticmeasurement AT zhiboma microfabricatedcompactextrinsicfabryperotsensorforinsituharshenvironmentacousticmeasurement |