High‐Resolution and Surface‐Sensitive Tip‐Enhanced Raman Spectroscopy Characterization of Strained‐Silicon Devices through Cleanroom‐Compatible Plasmonic Probes
Abstract Reliable characterization techniques that guarantee real‐time quality control with a non‐destructive and multiscale approach are currently an essential necessity for electronic industries. Tip‐Enhanced Raman Spectroscopy (TERS) offers an excellent solution to this demand. In addition to pro...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-05-01
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| Series: | Advanced Materials Interfaces |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/admi.202400876 |
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