A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i>
Since the discovery of the unique auditory system of the <i>Ormia ochracea</i> fly, researchers have designed various directional acoustic sensors inspired by its principles. However, most of these sensors operate only within a single- or dual-frequency band and typically exhibit high ei...
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MDPI AG
2025-04-01
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| Online Access: | https://www.mdpi.com/2072-666X/16/4/451 |
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| author | Yi Liu Liye Zhao Xukai Ding |
| author_facet | Yi Liu Liye Zhao Xukai Ding |
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| description | Since the discovery of the unique auditory system of the <i>Ormia ochracea</i> fly, researchers have designed various directional acoustic sensors inspired by its principles. However, most of these sensors operate only within a single- or dual-frequency band and typically exhibit high eigenfrequencies, making them unsuitable for low-frequency applications. This paper proposes a low-frequency, multi-band piezoelectric MEMS acoustic sensor that incorporates an improved coupling structure within the inner diaphragm to enable low-frequency signal detection in a compact design. Additionally, an asymmetric wing and coupled structure are introduced in both the inner and outer diaphragms to achieve multi-band frequency response. Aluminum nitride (AlN), a material with low dielectric and acoustic losses, is selected as the piezoelectric material. The sensor operates in the d₃₃ mode and employs a branched comb-like interdigitated electrode design to enhance the signal-to-noise ratio (SNR). Simulation results demonstrate that the four eigenfrequencies of the sensor are evenly distributed below 2000 Hz, and at all eigenfrequencies, the sensor exhibits a consistent cosine response to variations in the incident elevation angle of the sound source. |
| format | Article |
| id | doaj-art-594522a08ff040598eb3aacc5fdd998d |
| institution | DOAJ |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-04-01 |
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| series | Micromachines |
| spelling | doaj-art-594522a08ff040598eb3aacc5fdd998d2025-08-20T03:13:50ZengMDPI AGMicromachines2072-666X2025-04-0116445110.3390/mi16040451A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i>Yi Liu0Liye Zhao1Xukai Ding2School of Instrument Science and Engineering, Southeast University, Nanjing 210096, ChinaSchool of Instrument Science and Engineering, Southeast University, Nanjing 210096, ChinaSchool of Instrument Science and Engineering, Southeast University, Nanjing 210096, ChinaSince the discovery of the unique auditory system of the <i>Ormia ochracea</i> fly, researchers have designed various directional acoustic sensors inspired by its principles. However, most of these sensors operate only within a single- or dual-frequency band and typically exhibit high eigenfrequencies, making them unsuitable for low-frequency applications. This paper proposes a low-frequency, multi-band piezoelectric MEMS acoustic sensor that incorporates an improved coupling structure within the inner diaphragm to enable low-frequency signal detection in a compact design. Additionally, an asymmetric wing and coupled structure are introduced in both the inner and outer diaphragms to achieve multi-band frequency response. Aluminum nitride (AlN), a material with low dielectric and acoustic losses, is selected as the piezoelectric material. The sensor operates in the d₃₃ mode and employs a branched comb-like interdigitated electrode design to enhance the signal-to-noise ratio (SNR). Simulation results demonstrate that the four eigenfrequencies of the sensor are evenly distributed below 2000 Hz, and at all eigenfrequencies, the sensor exhibits a consistent cosine response to variations in the incident elevation angle of the sound source.https://www.mdpi.com/2072-666X/16/4/451<i>Ormia ochracea</i>multi-bandlow frequencyacoustic sensorpiezoelectric |
| spellingShingle | Yi Liu Liye Zhao Xukai Ding A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i> Micromachines <i>Ormia ochracea</i> multi-band low frequency acoustic sensor piezoelectric |
| title | A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i> |
| title_full | A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i> |
| title_fullStr | A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i> |
| title_full_unstemmed | A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i> |
| title_short | A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by <i>Ormia ochracea</i> |
| title_sort | low frequency multi band piezoelectric mems acoustic sensor inspired by i ormia ochracea i |
| topic | <i>Ormia ochracea</i> multi-band low frequency acoustic sensor piezoelectric |
| url | https://www.mdpi.com/2072-666X/16/4/451 |
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