Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation

Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation

By the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying contin...

Full description

Saved in:
Bibliographic Details
Main Authors: O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, V.F. Gorban’, N.V. Pinchuk, A.A. Meylekhov
Format: Article
Language:English
Published: Sumy State University 2015-03-01
Series:Журнал нано- та електронної фізики
Subjects:
Vacuum-arc method
Pressure
Bias potential
CrN
TiN
Texture
Substructure
Microstrain
Size of crystallite
Online Access:http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01034.pdf
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items

Similar Items