Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation
By the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying contin...
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| Format: | Article |
| Language: | English |
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Sumy State University
2015-03-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01034.pdf |
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| author | O.V. Sobol’ A.A. Andreev V.A. Stolbovoy V.F. Gorban’ N.V. Pinchuk A.A. Meylekhov |
| author_facet | O.V. Sobol’ A.A. Andreev V.A. Stolbovoy V.F. Gorban’ N.V. Pinchuk A.A. Meylekhov |
| author_sort | O.V. Sobol’ |
| collection | DOAJ |
| description | By the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying continuous and pulsed negative bias potential. Formation of two-phase state with a preferred orientation of the crystallite growth was established at high pressure of (1 ... 5)×10–3 Torr and feeding of negative DC bias potential: Ub = – 20 V – texture axis [100], at – 230 V – texture axis [111]. Based on the studies of substructural state, connection of the transition to the superhard (57 GPa) state with decrease in the crystallite size and microstrain in TiN layers was established. |
| format | Article |
| id | doaj-art-582f0c271d034fb1bca9fd111e490331 |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2015-03-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-582f0c271d034fb1bca9fd111e4903312025-08-20T03:19:34ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-03-017101034-101034-6Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc EvaporationO.V. Sobol’0A.A. Andreev1V.A. Stolbovoy2V.F. Gorban’3N.V. Pinchuk4A.A. Meylekhov5National Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., 61002 Kharkiv, UkraineNational Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, UkraineNational Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, UkraineFrantsevich Institute for Problems of Materials Science, 3, Krzhizhanovsky Str., 03680 Kyiv-142, UkraineNational Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., 61002 Kharkiv, UkraineNational Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., 61002 Kharkiv, UkraineBy the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying continuous and pulsed negative bias potential. Formation of two-phase state with a preferred orientation of the crystallite growth was established at high pressure of (1 ... 5)×10–3 Torr and feeding of negative DC bias potential: Ub = – 20 V – texture axis [100], at – 230 V – texture axis [111]. Based on the studies of substructural state, connection of the transition to the superhard (57 GPa) state with decrease in the crystallite size and microstrain in TiN layers was established.http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01034.pdfVacuum-arc methodPressureBias potentialCrNTiNTextureSubstructureMicrostrainSize of crystallite |
| spellingShingle | O.V. Sobol’ A.A. Andreev V.A. Stolbovoy V.F. Gorban’ N.V. Pinchuk A.A. Meylekhov Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation Журнал нано- та електронної фізики Vacuum-arc method Pressure Bias potential CrN TiN Texture Substructure Microstrain Size of crystallite |
| title | Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation |
| title_full | Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation |
| title_fullStr | Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation |
| title_full_unstemmed | Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation |
| title_short | Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation |
| title_sort | structural engineering of multilayer tin crn system obtained by the vacuum arc evaporation |
| topic | Vacuum-arc method Pressure Bias potential CrN TiN Texture Substructure Microstrain Size of crystallite |
| url | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01034.pdf |
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