Capacitive properties of zinc oxide thin films by radiofrequency magnetron sputtering
Abstract The study focused on the production of zinc oxide (ZnO) thin films as a dielectric material for use in metal–insulator–semiconductor capacitors. The objective of this study has demonstrated the frequency dependence of conductivity and capacity. Zinc oxide (ZnO) was thin films deposited by a...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Oxford International Collaboration Centre Press (OICC press)
2018-11-01
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| Series: | Journal of Theoretical and Applied Physics |
| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1007/s40094-018-0309-9 |
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