Using a Bias Potential in a Constant and Pulse Modes for Structural Engineering Vacuum Arc Nanocrystalline Coatings of Zirconium Nitride

In order to develop the direction of "structural engineering nitride coatings" in the work conducted systematic analysis of the impact of the negative bias potential (direct and high-voltage pulse) on the structure, substructure and mechanical properties of ZrN coatings obtained by vacuum...

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Bibliographic Details
Main Authors: O.V. Sobol', A.A. Andreev, V.A. Stolbovoy, V.F. Gorban, N.V. Pinchuk, A.A. Meylekhov
Format: Article
Language:English
Published: Sumy State University 2014-11-01
Series:Журнал нано- та електронної фізики
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Online Access:http://jnep.sumdu.edu.ua/download/numbers/2014/4/articles/jnep_2014_V6_04013.pdf
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