Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators
Abstract The demand for highly sensitive and accurate sensors has grown significantly, particularly in the field of Micro-Electro-Mechanical Systems technology. Mode-localized sensors based on weakly coupled resonators have garnered attention for their high sensitivity through amplitude ratio output...
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2025-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00954-y |
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| author | Han Li Zhao Zhang PeiYuan Zhu GuoHua Zhang Yongcun Hao Honglong Chang |
| author_facet | Han Li Zhao Zhang PeiYuan Zhu GuoHua Zhang Yongcun Hao Honglong Chang |
| author_sort | Han Li |
| collection | DOAJ |
| description | Abstract The demand for highly sensitive and accurate sensors has grown significantly, particularly in the field of Micro-Electro-Mechanical Systems technology. Mode-localized sensors based on weakly coupled resonators have garnered attention for their high sensitivity through amplitude ratio outputs. However, when measuring multiple signals by weakly coupled resonators, different signals can interfere with each other, causing high cross-sensitivity. This cross-sensitivity greatly complicates signal separation and makes accurate measurement extremely difficult, impacting system performance. To address this issue, the study proposes an innovative constant-drive technique of weakly coupled resonators. This technique significantly reduces crosstalk between signals while maintaining high sensitivity of amplitude ratio output. The method is theoretically validated by analyzing amplitude ratios under signal perturbations in non-damped conditions, demonstrating perfect elimination of cross-interference. Finite element analysis under damping conditions further validated the constant-drive technique, showing a cross-sensitivity of 0.054%, nearly three orders of magnitude lower than that of mode-localized sensors. Experimental validation confirmed the effectiveness of the proposed technique, with the cross-sensitivity of the mode-localized method measured at 26.3% and 28.7%, respectively, while the constant-frequency drive achieved significantly lower values of 3.1% and 1.1%. This demonstrates a successful reduction in cross-sensitivity by an order of magnitude, meeting the performance requirements for typical MEMS biaxial sensor applications. This method is highly significant for mode-localized sensors, offering potential for developing multi-signal measurement devices like multi-axis accelerometers, force sensor, electric field sensor and mass sensor. |
| format | Article |
| id | doaj-art-56d03ea3eeae4dc99c6a8bb9d6b72fc5 |
| institution | OA Journals |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-05-01 |
| publisher | Nature Publishing Group |
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| series | Microsystems & Nanoengineering |
| spelling | doaj-art-56d03ea3eeae4dc99c6a8bb9d6b72fc52025-08-20T01:49:40ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-05-0111111310.1038/s41378-025-00954-ySynchronous detection of dual signals based on constant-drive technique of weakly coupled resonatorsHan Li0Zhao Zhang1PeiYuan Zhu2GuoHua Zhang3Yongcun Hao4Honglong Chang5Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical UniversityMinistry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical UniversityMinistry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical UniversityMinistry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical UniversityMinistry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical UniversityMinistry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical UniversityAbstract The demand for highly sensitive and accurate sensors has grown significantly, particularly in the field of Micro-Electro-Mechanical Systems technology. Mode-localized sensors based on weakly coupled resonators have garnered attention for their high sensitivity through amplitude ratio outputs. However, when measuring multiple signals by weakly coupled resonators, different signals can interfere with each other, causing high cross-sensitivity. This cross-sensitivity greatly complicates signal separation and makes accurate measurement extremely difficult, impacting system performance. To address this issue, the study proposes an innovative constant-drive technique of weakly coupled resonators. This technique significantly reduces crosstalk between signals while maintaining high sensitivity of amplitude ratio output. The method is theoretically validated by analyzing amplitude ratios under signal perturbations in non-damped conditions, demonstrating perfect elimination of cross-interference. Finite element analysis under damping conditions further validated the constant-drive technique, showing a cross-sensitivity of 0.054%, nearly three orders of magnitude lower than that of mode-localized sensors. Experimental validation confirmed the effectiveness of the proposed technique, with the cross-sensitivity of the mode-localized method measured at 26.3% and 28.7%, respectively, while the constant-frequency drive achieved significantly lower values of 3.1% and 1.1%. This demonstrates a successful reduction in cross-sensitivity by an order of magnitude, meeting the performance requirements for typical MEMS biaxial sensor applications. This method is highly significant for mode-localized sensors, offering potential for developing multi-signal measurement devices like multi-axis accelerometers, force sensor, electric field sensor and mass sensor.https://doi.org/10.1038/s41378-025-00954-y |
| spellingShingle | Han Li Zhao Zhang PeiYuan Zhu GuoHua Zhang Yongcun Hao Honglong Chang Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators Microsystems & Nanoengineering |
| title | Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators |
| title_full | Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators |
| title_fullStr | Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators |
| title_full_unstemmed | Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators |
| title_short | Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators |
| title_sort | synchronous detection of dual signals based on constant drive technique of weakly coupled resonators |
| url | https://doi.org/10.1038/s41378-025-00954-y |
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