Machine Learning‐Accelerated Reconstruction of Periodic Nanostructures with X‐ray Fluorescence Spectroscopy Methods
Abstract With advancements in the semiconductor industry, the complexity of three‐dimensional (3D) nanostructures becomes higher with continuously decreasing feature sizes. In order to monitor the processing steps, it is crucial to accurately determine the critical dimensions and composition of thes...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-05-01
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| Series: | Advanced Materials Interfaces |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/admi.202400898 |
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