The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG

Abstract With the introduction of technologies such as structural optimization and error correction, the performance of the MEMS quad-mass gyroscope (QMG) has significantly improved, while noise has gradually become a critical factor limiting its performance. For ease of analysis, this paper categor...

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Main Authors: Zhuolin Yu, Tong Zhou, Yi Zhou, Qilong Wu, Xinyuan Wang, Bo Jiang, Yan Su
Format: Article
Language:English
Published: Nature Publishing Group 2025-08-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-01008-z
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author Zhuolin Yu
Tong Zhou
Yi Zhou
Qilong Wu
Xinyuan Wang
Bo Jiang
Yan Su
author_facet Zhuolin Yu
Tong Zhou
Yi Zhou
Qilong Wu
Xinyuan Wang
Bo Jiang
Yan Su
author_sort Zhuolin Yu
collection DOAJ
description Abstract With the introduction of technologies such as structural optimization and error correction, the performance of the MEMS quad-mass gyroscope (QMG) has significantly improved, while noise has gradually become a critical factor limiting its performance. For ease of analysis, this paper categorizes noise into two types: noise at the signal detection end and noise at the excitation end. Firstly, a closed-loop noise model for QMG is established, and the effects of these two types of noise on the dynamic and static performance of QMG are investigated. Additionally, the correlation between structural parameters and noise transmission is analyzed, and the dual impact of DC Bias Voltage optimization on improving QMG performance is explored. Based on the above analysis, a force-to-rebalance (FTR) dual-loop control method incorporating SID and normalized least mean squares (NLMS) is proposed and applied to the MEMS QMG, where SID and NLMS are respectively employed to mitigate the influence of detection-end and drive-end noise on the bias performance. Compared to the traditional method, the proposed approach reduces the bias instability (BI) of the MEMS QMG from 0.407°/h to 0.024°/h and the angular random walk (ARW) from 0.137°/√h to 0.006°/√h, achieving improvements of 16.96 times and 22.83 times, respectively. Furthermore, the system achieves a threshold of 0.0001°/s.
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spelling doaj-art-56274aa6ccc44317abaf95efb455b2b32025-08-24T11:34:58ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-08-0111111010.1038/s41378-025-01008-zThe FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMGZhuolin Yu0Tong Zhou1Yi Zhou2Qilong Wu3Xinyuan Wang4Bo Jiang5Yan Su6School of Mechanical Engineering, Nanjing University of Science and TechnologySchool of Mechanical Engineering, Nanjing University of Science and TechnologySchool of Mechanical Engineering, Nanjing University of Science and TechnologySchool of Mechanical Engineering, Nanjing University of Science and TechnologySchool of Mechanical Engineering, Nanjing University of Science and TechnologySchool of Mechanical Engineering, Nanjing University of Science and TechnologySchool of Mechanical Engineering, Nanjing University of Science and TechnologyAbstract With the introduction of technologies such as structural optimization and error correction, the performance of the MEMS quad-mass gyroscope (QMG) has significantly improved, while noise has gradually become a critical factor limiting its performance. For ease of analysis, this paper categorizes noise into two types: noise at the signal detection end and noise at the excitation end. Firstly, a closed-loop noise model for QMG is established, and the effects of these two types of noise on the dynamic and static performance of QMG are investigated. Additionally, the correlation between structural parameters and noise transmission is analyzed, and the dual impact of DC Bias Voltage optimization on improving QMG performance is explored. Based on the above analysis, a force-to-rebalance (FTR) dual-loop control method incorporating SID and normalized least mean squares (NLMS) is proposed and applied to the MEMS QMG, where SID and NLMS are respectively employed to mitigate the influence of detection-end and drive-end noise on the bias performance. Compared to the traditional method, the proposed approach reduces the bias instability (BI) of the MEMS QMG from 0.407°/h to 0.024°/h and the angular random walk (ARW) from 0.137°/√h to 0.006°/√h, achieving improvements of 16.96 times and 22.83 times, respectively. Furthermore, the system achieves a threshold of 0.0001°/s.https://doi.org/10.1038/s41378-025-01008-z
spellingShingle Zhuolin Yu
Tong Zhou
Yi Zhou
Qilong Wu
Xinyuan Wang
Bo Jiang
Yan Su
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG
Microsystems & Nanoengineering
title The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG
title_full The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG
title_fullStr The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG
title_full_unstemmed The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG
title_short The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG
title_sort ftr dual loop architecture based on sid nlms can achieve a threshold of 0 0001° s and an arw of 0 006° √h for mems qmg
url https://doi.org/10.1038/s41378-025-01008-z
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