Deep learning driven silicon wafer defect segmentation and classification
Integrated Circuits are made of various transistors that are embedded on a silicon wafer, these wafers are difficult to process and hence are prone to defects. Defecting these defects manually is a time consuming and labour-intensive task and hence automation is necessary. Deep Learning approach is...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-06-01
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| Series: | MethodsX |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2215016125000068 |
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