Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique
Zinc oxide (ZnO) exhibits piezoelectric properties due to its asymmetric structure, making it suitable for piezoelectric devices. This experiment deposited Fe-doped ZnO films on silicon substrates using a dual-target magnetron co-sputtering system. The films achieved a high c-axis orientation, and t...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
|
| Series: | Condensed Matter |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2410-3896/10/1/6 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|