Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique
Zinc oxide (ZnO) exhibits piezoelectric properties due to its asymmetric structure, making it suitable for piezoelectric devices. This experiment deposited Fe-doped ZnO films on silicon substrates using a dual-target magnetron co-sputtering system. The films achieved a high c-axis orientation, and t...
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MDPI AG
2025-01-01
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| author | Ya-Chih Cheng Sanjaya Brahma Sean Wu Jow-Lay Huang Alex C. H. Lee |
| author_facet | Ya-Chih Cheng Sanjaya Brahma Sean Wu Jow-Lay Huang Alex C. H. Lee |
| author_sort | Ya-Chih Cheng |
| collection | DOAJ |
| description | Zinc oxide (ZnO) exhibits piezoelectric properties due to its asymmetric structure, making it suitable for piezoelectric devices. This experiment deposited Fe-doped ZnO films on silicon substrates using a dual-target magnetron co-sputtering system. The films achieved a high c-axis orientation, and the piezoelectric coefficient of the film reached its optimal value of 44.35 pC/N when doped with 0.5 at% of Fe. This value is approximately three times that of undoped ZnO films with a piezoelectric coefficient of 13.04 pC/N. The study utilized a diffractometer, scanning electron microscopy, transmission electron microscopy, and atomic force microscopy to evaluate the crystal structure evolution of the zinc oxide films and employed X-ray photoelectron spectroscopy to assess the valence state of the Fe ions. |
| format | Article |
| id | doaj-art-5447dc0986664a60adfa690eaa58fa48 |
| institution | OA Journals |
| issn | 2410-3896 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
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| spelling | doaj-art-5447dc0986664a60adfa690eaa58fa482025-08-20T02:11:18ZengMDPI AGCondensed Matter2410-38962025-01-01101610.3390/condmat10010006Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering TechniqueYa-Chih Cheng0Sanjaya Brahma1Sean Wu2Jow-Lay Huang3Alex C. H. Lee4Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, TaiwanDepartment of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, TaiwanDepartment of Semiconductor Engineering, Lunghwa University of Science and Technology, Taoyuan 333326, TaiwanDepartment of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, TaiwanDepartment of Mechanical Engineering, National Chin-Yi University of Technology, Taichung 411030, TaiwanZinc oxide (ZnO) exhibits piezoelectric properties due to its asymmetric structure, making it suitable for piezoelectric devices. This experiment deposited Fe-doped ZnO films on silicon substrates using a dual-target magnetron co-sputtering system. The films achieved a high c-axis orientation, and the piezoelectric coefficient of the film reached its optimal value of 44.35 pC/N when doped with 0.5 at% of Fe. This value is approximately three times that of undoped ZnO films with a piezoelectric coefficient of 13.04 pC/N. The study utilized a diffractometer, scanning electron microscopy, transmission electron microscopy, and atomic force microscopy to evaluate the crystal structure evolution of the zinc oxide films and employed X-ray photoelectron spectroscopy to assess the valence state of the Fe ions.https://www.mdpi.com/2410-3896/10/1/6ZnOFe dopantpiezoelectric filmcrystal structure |
| spellingShingle | Ya-Chih Cheng Sanjaya Brahma Sean Wu Jow-Lay Huang Alex C. H. Lee Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique Condensed Matter ZnO Fe dopant piezoelectric film crystal structure |
| title | Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique |
| title_full | Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique |
| title_fullStr | Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique |
| title_full_unstemmed | Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique |
| title_short | Crystal Structure Evolution of Piezoelectric Fe-Doped ZnO Film by Magnetron Co-Sputtering Technique |
| title_sort | crystal structure evolution of piezoelectric fe doped zno film by magnetron co sputtering technique |
| topic | ZnO Fe dopant piezoelectric film crystal structure |
| url | https://www.mdpi.com/2410-3896/10/1/6 |
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