Preparation, microstructure and properties of LaCePr polishing slurry for optical glass CMP
Objectives: In recent years, cerium-based rare earth polishing liquids have been widely used in the field of chemical mechanical polishing (CMP) of glass and other materials due to their excellent selectivity and good polishing efficiency, but their polishing performance needs to be further improved...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2024-12-01
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| Series: | Jin'gangshi yu moliao moju gongcheng |
| Subjects: | |
| Online Access: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0225 |
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