Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser

Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser

In this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-induced periodic surface structures (LIPSS), and nanoparticles were fabricated by femtosecond laser processing (LP). A layer of hydrophobic species was formed on the micro/nano structures through perfluoros...

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Bibliographic Details
Main Authors: Junyu Duan, Gui Long, Xu Xu, Weiming Liu, Chuankun Li, Liang Chen, Jianguo Zhang, Junfeng Xiao
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Micromachines
Subjects:
micro/nano structures
anti-reflection
superhydrophobicity
femtosecond laser
durability
Online Access:https://www.mdpi.com/2072-666X/15/11/1304
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