Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser
In this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-induced periodic surface structures (LIPSS), and nanoparticles were fabricated by femtosecond laser processing (LP). A layer of hydrophobic species was formed on the micro/nano structures through perfluoros...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/11/1304 |
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| author | Junyu Duan Gui Long Xu Xu Weiming Liu Chuankun Li Liang Chen Jianguo Zhang Junfeng Xiao |
| author_facet | Junyu Duan Gui Long Xu Xu Weiming Liu Chuankun Li Liang Chen Jianguo Zhang Junfeng Xiao |
| author_sort | Junyu Duan |
| collection | DOAJ |
| description | In this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-induced periodic surface structures (LIPSS), and nanoparticles were fabricated by femtosecond laser processing (LP). A layer of hydrophobic species was formed on the micro/nano structures through perfluorosilane modification (PM). The reflectivity and hydrophobicity’s influence mechanisms of structural height, duty cycle, and size are experimentally elucidated. The average reflectivity of the silicon surface in the visible light band is reduced to 3.0% under the optimal parameters, and the surface exhibits a large contact angle of 172.3 ± 0.8° and a low sliding angle of 4.2 ± 1.4°. Finally, the durability of the anti-reflection and superhydrophobicity is also confirmed. This study deepens our understanding of the principles of anti-reflection and superhydrophobicity and expands the design and preparation methods for self-cleaning and anti-reflective surfaces. |
| format | Article |
| id | doaj-art-533df10d60b24e36916deae84ee983c4 |
| institution | OA Journals |
| issn | 2072-666X |
| language | English |
| publishDate | 2024-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-533df10d60b24e36916deae84ee983c42025-08-20T01:54:03ZengMDPI AGMicromachines2072-666X2024-10-011511130410.3390/mi15111304Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond LaserJunyu Duan0Gui Long1Xu Xu2Weiming Liu3Chuankun Li4Liang Chen5Jianguo Zhang6Junfeng Xiao7State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaState Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaHubei Jiuzhiyang Infrared System Co., Ltd., Wuhan 430223, ChinaChina Ship Development and Design Center, Wuhan 430064, ChinaChina Ship Development and Design Center, Wuhan 430064, ChinaState Key Laboratory of High-End Heavy-Load Robots, Midea Group, Foshan 528300, ChinaState Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaState Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaIn this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-induced periodic surface structures (LIPSS), and nanoparticles were fabricated by femtosecond laser processing (LP). A layer of hydrophobic species was formed on the micro/nano structures through perfluorosilane modification (PM). The reflectivity and hydrophobicity’s influence mechanisms of structural height, duty cycle, and size are experimentally elucidated. The average reflectivity of the silicon surface in the visible light band is reduced to 3.0% under the optimal parameters, and the surface exhibits a large contact angle of 172.3 ± 0.8° and a low sliding angle of 4.2 ± 1.4°. Finally, the durability of the anti-reflection and superhydrophobicity is also confirmed. This study deepens our understanding of the principles of anti-reflection and superhydrophobicity and expands the design and preparation methods for self-cleaning and anti-reflective surfaces.https://www.mdpi.com/2072-666X/15/11/1304micro/nano structuresanti-reflectionsuperhydrophobicityfemtosecond laserdurability |
| spellingShingle | Junyu Duan Gui Long Xu Xu Weiming Liu Chuankun Li Liang Chen Jianguo Zhang Junfeng Xiao Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser Micromachines micro/nano structures anti-reflection superhydrophobicity femtosecond laser durability |
| title | Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser |
| title_full | Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser |
| title_fullStr | Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser |
| title_full_unstemmed | Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser |
| title_short | Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser |
| title_sort | hierarchical micro nanostructures with anti reflection and superhydrophobicity on the silicon surface fabricated by femtosecond laser |
| topic | micro/nano structures anti-reflection superhydrophobicity femtosecond laser durability |
| url | https://www.mdpi.com/2072-666X/15/11/1304 |
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