Tuning refractive index change of SiNx induced by ultrafast laser pulses
We demonstrate the feasibility of femtosecond laser pulses to tune refractive index of SiNx, enabling direct writing waveguides in SiNx and reconfiguring microring resonators. The refractive index increases with pulse energy and pulse density.
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2024-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_02021.pdf |
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