Tuning refractive index change of SiNx induced by ultrafast laser pulses

We demonstrate the feasibility of femtosecond laser pulses to tune refractive index of SiNx, enabling direct writing waveguides in SiNx and reconfiguring microring resonators. The refractive index increases with pulse energy and pulse density.

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Bibliographic Details
Main Authors: Shayeganrad Gholamreza, Beresna Martynas, Bucio Thalia Domínguez, Brambilla Gilberto, Gardes Fredric Y.
Format: Article
Language:English
Published: EDP Sciences 2024-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_02021.pdf
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Description
Summary:We demonstrate the feasibility of femtosecond laser pulses to tune refractive index of SiNx, enabling direct writing waveguides in SiNx and reconfiguring microring resonators. The refractive index increases with pulse energy and pulse density.
ISSN:2100-014X