Miniaturized Wide-Range Field-Emission Vacuum Gauge
Miniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force micros...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-11-01
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| Series: | Nanomaterials and Nanotechnology |
| Subjects: | |
| Online Access: | http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gauge |
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