Miniaturized Wide-Range Field-Emission Vacuum Gauge
Miniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force micros...
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| Format: | Article |
| Language: | English |
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Wiley
2014-11-01
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| Series: | Nanomaterials and Nanotechnology |
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| Online Access: | http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gauge |
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| author | Amra Avdić Anna Maria Lausch Emmerich Bertagnolli Alois Lugstein |
| author_facet | Amra Avdić Anna Maria Lausch Emmerich Bertagnolli Alois Lugstein |
| author_sort | Amra Avdić |
| collection | DOAJ |
| description | Miniaturized vacuum gauges (MVGs) for the measurement
range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned
approach using focused ion beam (FIB) nanomachining
and reactive ion etching (RIE). The MVG consists
of two properly insulated electrodes integrated on top of
an atomic force microscopy (AFM) tip, forming a coaxial
embodiment. The special design enables us to vary the
cathode-anode separation and the turn-on voltage changes
accordingly. The experiments show that the MVGs operate
at low bias potential and demonstrate very good I-P
dependence over a wide pressure range. |
| format | Article |
| id | doaj-art-510efb3e283f45bea9f90815d146e1de |
| institution | DOAJ |
| issn | 1847-9804 |
| language | English |
| publishDate | 2014-11-01 |
| publisher | Wiley |
| record_format | Article |
| series | Nanomaterials and Nanotechnology |
| spelling | doaj-art-510efb3e283f45bea9f90815d146e1de2025-08-20T03:18:09ZengWileyNanomaterials and Nanotechnology1847-98042014-11-01429http://dx.doi.org/10.5772/5948347931Miniaturized Wide-Range Field-Emission Vacuum GaugeAmra AvdićAnna Maria LauschEmmerich BertagnolliAlois LugsteinMiniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force microscopy (AFM) tip, forming a coaxial embodiment. The special design enables us to vary the cathode-anode separation and the turn-on voltage changes accordingly. The experiments show that the MVGs operate at low bias potential and demonstrate very good I-P dependence over a wide pressure range.http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gaugeNanoscale vacuum gaugefield emission |
| spellingShingle | Amra Avdić Anna Maria Lausch Emmerich Bertagnolli Alois Lugstein Miniaturized Wide-Range Field-Emission Vacuum Gauge Nanomaterials and Nanotechnology Nanoscale vacuum gauge field emission |
| title | Miniaturized Wide-Range Field-Emission Vacuum Gauge |
| title_full | Miniaturized Wide-Range Field-Emission Vacuum Gauge |
| title_fullStr | Miniaturized Wide-Range Field-Emission Vacuum Gauge |
| title_full_unstemmed | Miniaturized Wide-Range Field-Emission Vacuum Gauge |
| title_short | Miniaturized Wide-Range Field-Emission Vacuum Gauge |
| title_sort | miniaturized wide range field emission vacuum gauge |
| topic | Nanoscale vacuum gauge field emission |
| url | http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gauge |
| work_keys_str_mv | AT amraavdic miniaturizedwiderangefieldemissionvacuumgauge AT annamarialausch miniaturizedwiderangefieldemissionvacuumgauge AT emmerichbertagnolli miniaturizedwiderangefieldemissionvacuumgauge AT aloislugstein miniaturizedwiderangefieldemissionvacuumgauge |