Miniaturized Wide-Range Field-Emission Vacuum Gauge
Miniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force micros...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-11-01
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| Series: | Nanomaterials and Nanotechnology |
| Subjects: | |
| Online Access: | http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gauge |
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| Summary: | Miniaturized vacuum gauges (MVGs) for the measurement
range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned
approach using focused ion beam (FIB) nanomachining
and reactive ion etching (RIE). The MVG consists
of two properly insulated electrodes integrated on top of
an atomic force microscopy (AFM) tip, forming a coaxial
embodiment. The special design enables us to vary the
cathode-anode separation and the turn-on voltage changes
accordingly. The experiments show that the MVGs operate
at low bias potential and demonstrate very good I-P
dependence over a wide pressure range. |
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| ISSN: | 1847-9804 |