Effect of voltage on electrochemical mechanical polishing (ECMP) of 4H–SiC with fixed abrasives
This study employs the fixed agglomerated diamond abrasive pad (FADAP) to enhance the processing efficiency and surface quality of 4H–SiC. The effects of voltage on real-time current density, interface resistance, material removal rate (MRR), and surface roughness Ra during the electrochemical mecha...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-05-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785425011809 |
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