The fabrication of MEMS alkali metal vapor cells based on ultrafast laser welding for single beam magnetometer
Abstract The development of micro-electro-mechanical system (MEMS) alkali metal vapor cells offers the potential for the batch fabrication of micro-quantum sensors for atomic clocks, atomic magnetometers and atomic gyroscopes. The sealing of MEMS vapor cells is traditionally achieved by anodic bondi...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-08-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00976-6 |
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