The fabrication of MEMS alkali metal vapor cells based on ultrafast laser welding for single beam magnetometer

The fabrication of MEMS alkali metal vapor cells based on ultrafast laser welding for single beam magnetometer

Abstract The development of micro-electro-mechanical system (MEMS) alkali metal vapor cells offers the potential for the batch fabrication of micro-quantum sensors for atomic clocks, atomic magnetometers and atomic gyroscopes. The sealing of MEMS vapor cells is traditionally achieved by anodic bondi...

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Bibliographic Details
Main Authors: Yanbin Wang, Mingzhi Yu, Yao Chen, Yintao Ma, Xiangguang Han, Yong Xia, Ju Guo, Ping Yang, Qijing Lin, Shujiang Ding, Libo Zhao
Format: Article
Language:English
Published: Nature Publishing Group 2025-08-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-00976-6
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