Laser Self-Mixing Grating Interferometer for MEMS Accelerometer Testing
A simple and robust testing system based on a laser self-mixing grating interferometer (SMGI) is proposed to determine the sensitivity of accelerometers. Self-mixing grating interference occurs when the light emitted from a laser diode is incident onto a reflective grating at a fixed angle and the f...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
|
| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8255609/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!