Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays
Uncooled bolometric type thermal detectors, combined into a matrix and placed into a focal plane array have the following characteristics: low cost, operation at room temperature, compatibility with the silicon CMOS technology, and high detecting performance; therefore recently it became a hot spot...
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-04-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/3603 |
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| _version_ | 1849336269867319296 |
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| author | Van Trieu Tran V. R. Stempitsky I. Yu. Lovshenko K. V. Korsak Dinh Ha Dao |
| author_facet | Van Trieu Tran V. R. Stempitsky I. Yu. Lovshenko K. V. Korsak Dinh Ha Dao |
| author_sort | Van Trieu Tran |
| collection | DOAJ |
| description | Uncooled bolometric type thermal detectors, combined into a matrix and placed into a focal plane array have the following characteristics: low cost, operation at room temperature, compatibility with the silicon CMOS technology, and high detecting performance; therefore recently it became a hot spot in infrared or terahertz detection field. The performance of uncooled infrared focal plane detector arrays depends on the optimization of critical parameters which are determined by geometrical design and the electrical, optical, and thermal physical properties of the detector materials. We report the study of a fabrication process and characterization of two (2D) dimensional arrays of uncooled microbolometers based on silicon (α-Si) thermo-sensing films. Because these arrays substantially reduce sensor size, they are becoming the preferred format for most modern applications. |
| format | Article |
| id | doaj-art-4edac00829f5467ca764349bca7686c5 |
| institution | Kabale University |
| issn | 1729-7648 |
| language | Russian |
| publishDate | 2023-04-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj-art-4edac00829f5467ca764349bca7686c52025-08-20T03:45:02ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482023-04-01212778510.35596/1729-7648-2023-21-2-77-851893Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane ArraysVan Trieu Tran0V. R. Stempitsky1I. Yu. Lovshenko2K. V. Korsak3Dinh Ha Dao4Belarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsLe Quy Don University of Science and TechnologyUncooled bolometric type thermal detectors, combined into a matrix and placed into a focal plane array have the following characteristics: low cost, operation at room temperature, compatibility with the silicon CMOS technology, and high detecting performance; therefore recently it became a hot spot in infrared or terahertz detection field. The performance of uncooled infrared focal plane detector arrays depends on the optimization of critical parameters which are determined by geometrical design and the electrical, optical, and thermal physical properties of the detector materials. We report the study of a fabrication process and characterization of two (2D) dimensional arrays of uncooled microbolometers based on silicon (α-Si) thermo-sensing films. Because these arrays substantially reduce sensor size, they are becoming the preferred format for most modern applications.https://doklady.bsuir.by/jour/article/view/3603detectoruncooled microbolometerinfrared detectorthermo-sensingamorphous siliconmodeling |
| spellingShingle | Van Trieu Tran V. R. Stempitsky I. Yu. Lovshenko K. V. Korsak Dinh Ha Dao Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki detector uncooled microbolometer infrared detector thermo-sensing amorphous silicon modeling |
| title | Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays |
| title_full | Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays |
| title_fullStr | Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays |
| title_full_unstemmed | Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays |
| title_short | Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays |
| title_sort | design and performance of amorphous silicon based on uncooled bolometer type infrared focal plane arrays |
| topic | detector uncooled microbolometer infrared detector thermo-sensing amorphous silicon modeling |
| url | https://doklady.bsuir.by/jour/article/view/3603 |
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