On the preparation and characterization of thin NiTi shape memory alloy wires for MEMS
Shape memory alloy (SMA) wires are employed as actuators in small devices for consumer electronics, valves and automotive applications. Because of the continued miniaturization of all the industrial products, nowadays the tendency is to produce MEMS (micro electromechanical systems). Among the mos...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Gruppo Italiano Frattura
2012-12-01
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| Series: | Fracture and Structural Integrity |
| Subjects: | |
| Online Access: | https://www.fracturae.com/index.php/fis/article/view/157 |
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| Summary: | Shape memory alloy (SMA) wires are employed as actuators in small devices for consumer
electronics, valves and automotive applications. Because of the continued miniaturization of all the industrial
products, nowadays the tendency is to produce MEMS (micro electromechanical systems). Among the most
promising functional MEMS materials, the thin SMA wires that are offering a rapid actuating response with
high power/weigh ratio of the material, are attracting a world wide interest. This paper is aimed at showing the
production process and the characterizations of thin NiTi shape memory wires. The activity was focused on
drawing procedure and on functional and TEM characterizations of the final products. In particular, it was
evaluated the performance of the SMA wires for actuators in terms of functional fatigue and thermo-mechanical
properties by means of an experimental apparatus design ad hoc for these specific tests |
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| ISSN: | 1971-8993 |