A Voxelized Transformer-Based Neural Network for 3D Reconstruction From Multi-Energy SEM Backscattered Electrons
Three-dimensional (3D) data analysis, especially 3D reconstruction, is critical within integrated circuits for quality control and inspection. The traditional 3D reconstruction, like multi-energy deconvolution scanning electron microscopy (MED-SEM), can achieved resolution of 5 nm in the horizontal...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11045923/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|