A<sub>2</sub>-Mode Lamb Passive-Wireless Surface-Acoustic-Wave Micro-Pressure Sensor Based on Cantilever Beam Structure

A<sub>2</sub>-Mode Lamb Passive-Wireless Surface-Acoustic-Wave Micro-Pressure Sensor Based on Cantilever Beam Structure

Passive-wireless surface-acoustic-wave (SAW) micro-pressure sensors are suitable for extreme scenarios where wired sensors are not applicable. However, as the measured pressure decreases, conventional SAW micro-pressure sensors struggle to meet expected performance due to insufficient sensitivity. T...

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Bibliographic Details
Main Authors: Zhuoyue Duan, Tao Wang, Wei Ji, Lihui Feng, Peng Yin, Jihua Lu, Litong Yin
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Sensors
Subjects:
SAW micro-pressure sensor
passive wireless
cantilever beam
MEMS-compatible manufacturing process
Online Access:https://www.mdpi.com/1424-8220/25/6/1873
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Summary:Passive-wireless surface-acoustic-wave (SAW) micro-pressure sensors are suitable for extreme scenarios where wired sensors are not applicable. However, as the measured pressure decreases, conventional SAW micro-pressure sensors struggle to meet expected performance due to insufficient sensitivity. This article proposes a a method of using an <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mi mathvariant="normal">A</mi><mn>2</mn></msub></semantics></math></inline-formula>-mode Lamb SAW sensor and introduces an inertial structure in the form of a cantilever beam to enhance sensitivity. An MEMS-compatible manufacturing process was employed to create a multi-layer structure of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mi>SiO</mi><mn>2</mn></msub></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi>AlN</mi></semantics></math></inline-formula>, and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi>SOI</mi></semantics></math></inline-formula> for the SAW micro-pressure sensor. To investigate the operational performance of the SAW micro-pressure sensor, a micro-pressure testing system was established. The experimental results demonstrate that the sensor exhibits high sensitivity to micro-pressure, validating the effectiveness of the proposed design.
ISSN:1424-8220

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