INITIAL DEFORMATION OF SINX/AL CANTILEVERS ACCORDING TO THERMAL BUDGET FOR MEMS SENSORS
Mechanical properties of MEMS devices are specified by their structure and process parameters, such as temperature, films thickness, deposition conditions, etc. These features, in particular, the deposition temperature and post deposition treatments, determine the residual stress in the films,...
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| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2018-08-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/248 |
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