Technologies for Fabricating Large-Size Diffraction Gratings
Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accur...
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MDPI AG
2025-03-01
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| Online Access: | https://www.mdpi.com/1424-8220/25/7/1990 |
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| author | Changfeng Shao Xinghui Li |
| author_facet | Changfeng Shao Xinghui Li |
| author_sort | Changfeng Shao |
| collection | DOAJ |
| description | Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accuracy requirements of gratings, and considering the need for high efficiency and low cost, the fabrication of large gratings is extremely difficult. This paper reviews the fabrication technologies for large diffraction gratings, including grating tiling technology, grating ruling technology, single-exposure lithography, optical mosaic grating technology, and scanning beam interference lithography. It introduces the basic principles, representative research, and research progress of these technologies, analyzes their advantages and current problems, and provides reference for the development and optimization of the fabrication technologies of large diffraction gratings. |
| format | Article |
| id | doaj-art-4d19ef05103744da9fd76f027731a2d7 |
| institution | DOAJ |
| issn | 1424-8220 |
| language | English |
| publishDate | 2025-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj-art-4d19ef05103744da9fd76f027731a2d72025-08-20T03:03:21ZengMDPI AGSensors1424-82202025-03-01257199010.3390/s25071990Technologies for Fabricating Large-Size Diffraction GratingsChangfeng Shao0Xinghui Li1Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaLarge-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accuracy requirements of gratings, and considering the need for high efficiency and low cost, the fabrication of large gratings is extremely difficult. This paper reviews the fabrication technologies for large diffraction gratings, including grating tiling technology, grating ruling technology, single-exposure lithography, optical mosaic grating technology, and scanning beam interference lithography. It introduces the basic principles, representative research, and research progress of these technologies, analyzes their advantages and current problems, and provides reference for the development and optimization of the fabrication technologies of large diffraction gratings.https://www.mdpi.com/1424-8220/25/7/1990large diffraction gratingstiled gratingsgrating ruling engineslaser interference lithographyfringe-locking technologiesoptical mosaic gratings |
| spellingShingle | Changfeng Shao Xinghui Li Technologies for Fabricating Large-Size Diffraction Gratings Sensors large diffraction gratings tiled gratings grating ruling engines laser interference lithography fringe-locking technologies optical mosaic gratings |
| title | Technologies for Fabricating Large-Size Diffraction Gratings |
| title_full | Technologies for Fabricating Large-Size Diffraction Gratings |
| title_fullStr | Technologies for Fabricating Large-Size Diffraction Gratings |
| title_full_unstemmed | Technologies for Fabricating Large-Size Diffraction Gratings |
| title_short | Technologies for Fabricating Large-Size Diffraction Gratings |
| title_sort | technologies for fabricating large size diffraction gratings |
| topic | large diffraction gratings tiled gratings grating ruling engines laser interference lithography fringe-locking technologies optical mosaic gratings |
| url | https://www.mdpi.com/1424-8220/25/7/1990 |
| work_keys_str_mv | AT changfengshao technologiesforfabricatinglargesizediffractiongratings AT xinghuili technologiesforfabricatinglargesizediffractiongratings |