Two-beam laser purification of quartz raw material
The paper presents a numerical simulation of laser separation under the influence of laser beams with wavelengths of 10.6 microns and 1.06 microns on quartz raw material used in the electronics industry in the manufacture of photomasks. The temperature fields obtained by the...
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| Main Authors: | V. A. Emelyanov, E. B. Shershnev, S. I. Sokolov |
|---|---|
| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2021-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/3076 |
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