Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump

Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump

The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely ga...

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Bibliographic Details
Main Authors: E. V. Svichkar, N. K. Nikulin, K. E. Demihov
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education 2018-05-01
Series:Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"
Subjects:
vacuum system
pumping characteristic
forvacuum
pressure
turbomolecular pump
conductivit
speed of action
flow
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdf
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