Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely ga...
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Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education
2018-05-01
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Series: | Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение" |
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Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdf |
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author | E. V. Svichkar N. K. Nikulin K. E. Demihov |
author_facet | E. V. Svichkar N. K. Nikulin K. E. Demihov |
author_sort | E. V. Svichkar |
collection | DOAJ |
description | The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping
characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the
pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely gas
release streams, gas flows due to leakage of structural elements. The influence of these factors on the
pumping characteristic of the vacuum system with TMN is considered in the work. A method for determining
the parameters of a fore-vacuum pump providing an improvement in the vacuum characteristics of a vacuum
system with TMN at elevated suction pressures is proposed |
format | Article |
id | doaj-art-4c02607e4e8643b1a5cfdbeb96efc063 |
institution | Kabale University |
issn | 2588-0373 2587-764X |
language | English |
publishDate | 2018-05-01 |
publisher | Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education |
record_format | Article |
series | Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение" |
spelling | doaj-art-4c02607e4e8643b1a5cfdbeb96efc0632025-02-02T01:48:10ZengOmsk State Technical University, Federal State Autonomous Educational Institution of Higher EducationОмский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"2588-03732587-764X2018-05-0121657110.25206/2588-0373-2018-2-1-65-71Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pumpE. V. Svichkar0 N. K. Nikulin1K. E. Demihov2Bauman Moscow State Technical UniversityBauman Moscow State Technical UniversityBauman Moscow State Technical UniversityThe pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely gas release streams, gas flows due to leakage of structural elements. The influence of these factors on the pumping characteristic of the vacuum system with TMN is considered in the work. A method for determining the parameters of a fore-vacuum pump providing an improvement in the vacuum characteristics of a vacuum system with TMN at elevated suction pressures is proposedhttps://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdfvacuum systempumping characteristicforvacuumpressureturbomolecular pumpconductivitspeed of actionflow |
spellingShingle | E. V. Svichkar N. K. Nikulin K. E. Demihov Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение" vacuum system pumping characteristic forvacuum pressure turbomolecular pump conductivit speed of action flow |
title | Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump |
title_full | Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump |
title_fullStr | Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump |
title_full_unstemmed | Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump |
title_short | Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump |
title_sort | method for calculating pumping characteristic of high vacuum system with turbomolecular vacuum pump |
topic | vacuum system pumping characteristic forvacuum pressure turbomolecular pump conductivit speed of action flow |
url | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdf |
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