Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump

The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely ga...

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Main Authors: E. V. Svichkar, N. K. Nikulin, K. E. Demihov
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education 2018-05-01
Series:Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"
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Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdf
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author E. V. Svichkar
N. K. Nikulin
K. E. Demihov
author_facet E. V. Svichkar
N. K. Nikulin
K. E. Demihov
author_sort E. V. Svichkar
collection DOAJ
description The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely gas release streams, gas flows due to leakage of structural elements. The influence of these factors on the pumping characteristic of the vacuum system with TMN is considered in the work. A method for determining the parameters of a fore-vacuum pump providing an improvement in the vacuum characteristics of a vacuum system with TMN at elevated suction pressures is proposed
format Article
id doaj-art-4c02607e4e8643b1a5cfdbeb96efc063
institution Kabale University
issn 2588-0373
2587-764X
language English
publishDate 2018-05-01
publisher Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education
record_format Article
series Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"
spelling doaj-art-4c02607e4e8643b1a5cfdbeb96efc0632025-02-02T01:48:10ZengOmsk State Technical University, Federal State Autonomous Educational Institution of Higher EducationОмский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"2588-03732587-764X2018-05-0121657110.25206/2588-0373-2018-2-1-65-71Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pumpE. V. Svichkar0 N. K. Nikulin1K. E. Demihov2Bauman Moscow State Technical UniversityBauman Moscow State Technical UniversityBauman Moscow State Technical UniversityThe pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely gas release streams, gas flows due to leakage of structural elements. The influence of these factors on the pumping characteristic of the vacuum system with TMN is considered in the work. A method for determining the parameters of a fore-vacuum pump providing an improvement in the vacuum characteristics of a vacuum system with TMN at elevated suction pressures is proposedhttps://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdfvacuum systempumping characteristicforvacuumpressureturbomolecular pumpconductivitspeed of actionflow
spellingShingle E. V. Svichkar
N. K. Nikulin
K. E. Demihov
Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"
vacuum system
pumping characteristic
forvacuum
pressure
turbomolecular pump
conductivit
speed of action
flow
title Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
title_full Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
title_fullStr Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
title_full_unstemmed Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
title_short Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
title_sort method for calculating pumping characteristic of high vacuum system with turbomolecular vacuum pump
topic vacuum system
pumping characteristic
forvacuum
pressure
turbomolecular pump
conductivit
speed of action
flow
url https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdf
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AT kedemihov methodforcalculatingpumpingcharacteristicofhighvacuumsystemwithturbomolecularvacuumpump