Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely ga...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education
2018-05-01
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| Series: | Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение" |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/%D0%A2.%202,%20%E2%84%96%201/65-71%20%D0%95.%20%D0%92.%20%D0%A1%D0%B2%D0%B8%D1%87%D0%BA%D0%B0%D1%80%D1%8C,%20%D0%9D.%20%D0%9A.%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD,%20%D0%9A.%20%D0%95.%20%D0%94%D0%B5%D0%BC%D0%B8%D1%85%D0%BE%D0%B2.pdf |
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| Summary: | The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping
characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the
pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely gas
release streams, gas flows due to leakage of structural elements. The influence of these factors on the
pumping characteristic of the vacuum system with TMN is considered in the work. A method for determining
the parameters of a fore-vacuum pump providing an improvement in the vacuum characteristics of a vacuum
system with TMN at elevated suction pressures is proposed |
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| ISSN: | 2588-0373 2587-764X |