Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges

Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges

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Bibliographic Details
Main Author:	Zhang Yue
Format:	Article
Language:	English
Published:	Science Press 2023-06-01
Series:	National Science Open
Online Access:	https://www.sciengine.com/doi/10.1360/nso/20230032
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