Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges

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Bibliographic Details
Main Author: Zhang Yue
Format: Article
Language:English
Published: Science Press 2023-06-01
Series:National Science Open
Online Access:https://www.sciengine.com/doi/10.1360/nso/20230032
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author Zhang Yue
author_facet Zhang Yue
author_sort Zhang Yue
collection DOAJ
format Article
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issn 2097-1168
language English
publishDate 2023-06-01
publisher Science Press
record_format Article
series National Science Open
spelling doaj-art-4bf4e8d82017424586834cde9a472def2025-08-20T02:47:08ZengScience PressNational Science Open2097-11682023-06-01210.1360/nso/20230032eb33e642Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challengesZhang Yue0["Academy for Advanced Interdisciplinary Science and Technology, Beijing Advanced Innovation Center for Materials Genome Engineering, University of Science and Technology Beijing, Beijing 100083, China","Beijing Key Laboratory for Advanced Energy Materials and Technologies, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China"]https://www.sciengine.com/doi/10.1360/nso/20230032
spellingShingle Zhang Yue
Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges
National Science Open
title Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges
title_full Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges
title_fullStr Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges
title_full_unstemmed Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges
title_short Sub-1-nm-node beyond-silicon materials and devices: Pathways, opportunities and challenges
title_sort sub 1 nm node beyond silicon materials and devices pathways opportunities and challenges
url https://www.sciengine.com/doi/10.1360/nso/20230032
work_keys_str_mv AT zhangyue sub1nmnodebeyondsiliconmaterialsanddevicespathwaysopportunitiesandchallenges