Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion
In order to simplify process procedure and improve conversion efficiency (η), we present new steps of laser opening and one-step POCl3 diffusion to fabricate selective emitter (SE) solar cells, in which heavily doped regions (HDR) and lightly doped regions (LDR) were formed simultaneously. For HDR,...
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| Format: | Article |
| Language: | English |
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Wiley
2015-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/2015/208270 |
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| author | Sheng-Shih Wang Jyh-Jier Ho Jia-Jhe Liou Jia-Show Ho Song-Yeu Tsai Hsien-Seng Hung Chi-Hsiao Yeh Kang L. Wang |
| author_facet | Sheng-Shih Wang Jyh-Jier Ho Jia-Jhe Liou Jia-Show Ho Song-Yeu Tsai Hsien-Seng Hung Chi-Hsiao Yeh Kang L. Wang |
| author_sort | Sheng-Shih Wang |
| collection | DOAJ |
| description | In order to simplify process procedure and improve conversion efficiency (η), we present new steps of laser opening and one-step POCl3 diffusion to fabricate selective emitter (SE) solar cells, in which heavily doped regions (HDR) and lightly doped regions (LDR) were formed simultaneously. For HDR, we divided six cells into two groups for POCl3 diffusion with sheet resistance (RS) of 40 Ω/sq (for group A) and 50 Ω/sq (for group B). The dry oxidation duration at a temperature of 850°C was 18, 25, and 35 min for the 3 different cells in each group. This created six SE samples with different RS pairings for the HDR and LDR. The optimal cell (sample SE2) with RS values of 40/81 Ω/Sq in HDR/LDR showed the best η of 16.20%, open circuit voltage (VOC) of 612.52 mV, and fill factor (FF) of 75.83%. The improvement ratios are 1.57% for η and 14.32% for external quantum efficiency (EQE) as compared with those of the two-step diffusion process of our previous study. Moreover, the one-step laser opening process and omitting the step of removing the damage caused by laser ablation especially reduce chemistry pollution, thus showing ecofriendly process for use in industrial-scale production. |
| format | Article |
| id | doaj-art-4a9df251d7fe4ea48dcb908caf7e9575 |
| institution | OA Journals |
| issn | 1110-662X 1687-529X |
| language | English |
| publishDate | 2015-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Photoenergy |
| spelling | doaj-art-4a9df251d7fe4ea48dcb908caf7e95752025-08-20T02:38:03ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2015-01-01201510.1155/2015/208270208270Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step DiffusionSheng-Shih Wang0Jyh-Jier Ho1Jia-Jhe Liou2Jia-Show Ho3Song-Yeu Tsai4Hsien-Seng Hung5Chi-Hsiao Yeh6Kang L. Wang7Department of Electrical Engineering, National Taiwan Ocean University, No. 2 Peining Road, Keelung 20224, TaiwanDepartment of Electrical Engineering, National Taiwan Ocean University, No. 2 Peining Road, Keelung 20224, TaiwanDepartment of Electrical Engineering, National Taiwan Ocean University, No. 2 Peining Road, Keelung 20224, TaiwanDepartment of Electrical Engineering, University of California, Los Angeles, CA 90095, USALaboratory of Green Energy & Environment Research, Industrial Technology Research Institute, Hsinchu 31061, TaiwanDepartment of Electrical Engineering, National Taiwan Ocean University, No. 2 Peining Road, Keelung 20224, TaiwanDepartment of Surgery, Chang Gung Memorial Hospital, Keelung 204, TaiwanDepartment of Electrical Engineering, University of California, Los Angeles, CA 90095, USAIn order to simplify process procedure and improve conversion efficiency (η), we present new steps of laser opening and one-step POCl3 diffusion to fabricate selective emitter (SE) solar cells, in which heavily doped regions (HDR) and lightly doped regions (LDR) were formed simultaneously. For HDR, we divided six cells into two groups for POCl3 diffusion with sheet resistance (RS) of 40 Ω/sq (for group A) and 50 Ω/sq (for group B). The dry oxidation duration at a temperature of 850°C was 18, 25, and 35 min for the 3 different cells in each group. This created six SE samples with different RS pairings for the HDR and LDR. The optimal cell (sample SE2) with RS values of 40/81 Ω/Sq in HDR/LDR showed the best η of 16.20%, open circuit voltage (VOC) of 612.52 mV, and fill factor (FF) of 75.83%. The improvement ratios are 1.57% for η and 14.32% for external quantum efficiency (EQE) as compared with those of the two-step diffusion process of our previous study. Moreover, the one-step laser opening process and omitting the step of removing the damage caused by laser ablation especially reduce chemistry pollution, thus showing ecofriendly process for use in industrial-scale production.http://dx.doi.org/10.1155/2015/208270 |
| spellingShingle | Sheng-Shih Wang Jyh-Jier Ho Jia-Jhe Liou Jia-Show Ho Song-Yeu Tsai Hsien-Seng Hung Chi-Hsiao Yeh Kang L. Wang Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion International Journal of Photoenergy |
| title | Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion |
| title_full | Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion |
| title_fullStr | Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion |
| title_full_unstemmed | Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion |
| title_short | Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion |
| title_sort | effects of sheet resistance on mc si selective emitter solar cells using laser opening and one step diffusion |
| url | http://dx.doi.org/10.1155/2015/208270 |
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