A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems

In recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the prem...

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Main Authors: Jiawei Xuan, Ting Zhu, Gao Peng, Fayou Sun, Dawei Dong
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Sensors
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Online Access:https://www.mdpi.com/1424-8220/24/22/7140
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author Jiawei Xuan
Ting Zhu
Gao Peng
Fayou Sun
Dawei Dong
author_facet Jiawei Xuan
Ting Zhu
Gao Peng
Fayou Sun
Dawei Dong
author_sort Jiawei Xuan
collection DOAJ
description In recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the premise of low cost. This paper reviews the development of MEMS inertial measurement unit (IMU) array technology. First, the different types of common inertial measurement unit arrays are introduced and the basic principles are explained. Secondly, IMU array’s development status is summarized by analyzing the research results over the years. Then, the key technologies and corresponding development status of IMU array are described, respectively, including error analysis modeling and calibration, data fusion technology, fault detection, and isolation technology. Finally, the characteristics and shortcomings of the past research results are summarized, the future research direction is discussed, and some thoughts are put forward to further improve the accuracy of the IMU array.
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spelling doaj-art-49cf027bb5f84e5bb6c5aca8a1b6a8ef2025-08-20T02:04:43ZengMDPI AGSensors1424-82202024-11-012422714010.3390/s24227140A Review on the Inertial Measurement Unit Array of Microelectromechanical SystemsJiawei Xuan0Ting Zhu1Gao Peng2Fayou Sun3Dawei Dong4School of Automation, Guangxi University of Science and Technology, Liuzhou 545006, ChinaSchool of Automation, Guangxi University of Science and Technology, Liuzhou 545006, ChinaSchool of Automation, Guangxi University of Science and Technology, Liuzhou 545006, ChinaSchool of Automation, Guangxi University of Science and Technology, Liuzhou 545006, ChinaSchool of Automation, Guangxi University of Science and Technology, Liuzhou 545006, ChinaIn recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the premise of low cost. This paper reviews the development of MEMS inertial measurement unit (IMU) array technology. First, the different types of common inertial measurement unit arrays are introduced and the basic principles are explained. Secondly, IMU array’s development status is summarized by analyzing the research results over the years. Then, the key technologies and corresponding development status of IMU array are described, respectively, including error analysis modeling and calibration, data fusion technology, fault detection, and isolation technology. Finally, the characteristics and shortcomings of the past research results are summarized, the future research direction is discussed, and some thoughts are put forward to further improve the accuracy of the IMU array.https://www.mdpi.com/1424-8220/24/22/7140microelectromechanical systemsinertial measurement unit arraydata fusion
spellingShingle Jiawei Xuan
Ting Zhu
Gao Peng
Fayou Sun
Dawei Dong
A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
Sensors
microelectromechanical systems
inertial measurement unit array
data fusion
title A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
title_full A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
title_fullStr A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
title_full_unstemmed A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
title_short A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
title_sort review on the inertial measurement unit array of microelectromechanical systems
topic microelectromechanical systems
inertial measurement unit array
data fusion
url https://www.mdpi.com/1424-8220/24/22/7140
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