Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning
In this study, we present the optimization of a Fabry-Perot interferometer with a differential signal utilized as the laser encoder to meet the stringent demands of nanopositioning. The proposed system aims to enhance stability and accuracy in nanopositioning applications by leveraging the common pa...
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| Main Authors: | Syuan-Cheng Chang, Chung-Ping Chang, Yung-Cheng Wang |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
University North
2025-01-01
|
| Series: | Tehnički Glasnik |
| Subjects: | |
| Online Access: | https://hrcak.srce.hr/file/480458 |
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