Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning
In this study, we present the optimization of a Fabry-Perot interferometer with a differential signal utilized as the laser encoder to meet the stringent demands of nanopositioning. The proposed system aims to enhance stability and accuracy in nanopositioning applications by leveraging the common pa...
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| Format: | Article |
| Language: | English |
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University North
2025-01-01
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| Series: | Tehnički Glasnik |
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| Online Access: | https://hrcak.srce.hr/file/480458 |
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| author | Syuan-Cheng Chang Chung-Ping Chang Yung-Cheng Wang |
| author_facet | Syuan-Cheng Chang Chung-Ping Chang Yung-Cheng Wang |
| author_sort | Syuan-Cheng Chang |
| collection | DOAJ |
| description | In this study, we present the optimization of a Fabry-Perot interferometer with a differential signal utilized as the laser encoder to meet the stringent demands of nanopositioning. The proposed system aims to enhance stability and accuracy in nanopositioning applications by leveraging the common path structure and coaxial characteristics of Fabry-Perot interferometers. To improve the resolution of this system, an interpolation module is employed to increase the laser encoder resolution to 15.82 nm. Compared to the simulated interference signal from traditional Fabry-Perot interferometers, the differential interference signal proposed in this study is more sinusoidal, thus reducing errors in resolution subdivision. To verify the correspondence between the actual interference signal and the simulated one, a signal testing experiment is implemented in this study. Eventually, the experimental signal results demonstrate that the actual light intensity signals match the simulated results, indicating that this signal can be significantly beneficial for use as a laser encoder. |
| format | Article |
| id | doaj-art-493180987bfc442f8a69e9e66e93c02e |
| institution | Kabale University |
| issn | 1846-6168 1848-5588 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | University North |
| record_format | Article |
| series | Tehnički Glasnik |
| spelling | doaj-art-493180987bfc442f8a69e9e66e93c02e2025-08-20T03:45:10ZengUniversity NorthTehnički Glasnik1846-61681848-55882025-01-0119341742110.31803/tg-20240514145648Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for NanopositioningSyuan-Cheng Chang0Chung-Ping Chang1Yung-Cheng Wang2National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, TaiwanNational Chiayi University, 300 Syuefu Road, Chiayi 600355, TaiwanNational Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, TaiwanIn this study, we present the optimization of a Fabry-Perot interferometer with a differential signal utilized as the laser encoder to meet the stringent demands of nanopositioning. The proposed system aims to enhance stability and accuracy in nanopositioning applications by leveraging the common path structure and coaxial characteristics of Fabry-Perot interferometers. To improve the resolution of this system, an interpolation module is employed to increase the laser encoder resolution to 15.82 nm. Compared to the simulated interference signal from traditional Fabry-Perot interferometers, the differential interference signal proposed in this study is more sinusoidal, thus reducing errors in resolution subdivision. To verify the correspondence between the actual interference signal and the simulated one, a signal testing experiment is implemented in this study. Eventually, the experimental signal results demonstrate that the actual light intensity signals match the simulated results, indicating that this signal can be significantly beneficial for use as a laser encoder.https://hrcak.srce.hr/file/480458differential signal processingFabry-Perot interferometerinterpolation modulelaser encodernanopositioning |
| spellingShingle | Syuan-Cheng Chang Chung-Ping Chang Yung-Cheng Wang Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning Tehnički Glasnik differential signal processing Fabry-Perot interferometer interpolation module laser encoder nanopositioning |
| title | Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning |
| title_full | Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning |
| title_fullStr | Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning |
| title_full_unstemmed | Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning |
| title_short | Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning |
| title_sort | development and optimization of a differential signal based fabry perot interferometer for nanopositioning |
| topic | differential signal processing Fabry-Perot interferometer interpolation module laser encoder nanopositioning |
| url | https://hrcak.srce.hr/file/480458 |
| work_keys_str_mv | AT syuanchengchang developmentandoptimizationofadifferentialsignalbasedfabryperotinterferometerfornanopositioning AT chungpingchang developmentandoptimizationofadifferentialsignalbasedfabryperotinterferometerfornanopositioning AT yungchengwang developmentandoptimizationofadifferentialsignalbasedfabryperotinterferometerfornanopositioning |